• Innovative and unique optical configuration enables the move to vertical devices in next-generation memory and microprocessor chips


• Built to Nova industry-leading stability and reliability standards


• Extends range of Nova’s market leading high productivity Optical CD solutions

The Nova T600 is an innovative product for process control of complex vertical structures for the 2x technology node and beyond. The powerful new Nova T600 Optical Critical Dimension (Optical CD) metrology system, developed in collaboration with leading device makers, has shown breakthrough metrology performance on critical device parameters, including up to 4 times increase in measurement sensitivity on critical profile parameters of advanced 3D applications.

New Optical Configuration
The Nova T600 features oblique incidence spectroscopic reflectometry and a normal-incidence reflectometer. This multi-channel reflectometry configuration is optimized for best sensitivity on small features, including at the bottom of high-aspect-ratio structures.

Reduced Cost of Ownership
Nova T600 is designed to meet the challenging cost of ownership requirements of semiconductor customers, achieved through a combination of high throughtput, Modular MetrologyTM, and the flexibility to optimize optical configuration and tool type to best serve application needs. Nova T600 metrology units fit into the full frame low vibration T-platform, designed with a Modular Metrology concept that provides unrivaled cost effectiveness.

T-platform can be configured to support multiple load ports and multiple measurement units - any combination of Nova T600 and Nova T500.