NOVA T500 is a high throughput high accuracy stand-alone optical CD platform following the highly-successful 3090Next metrology tool. It addresses the toughest challenges the industry faces: increasing metrology sampling, improving metrology precision and reducing metrology cost of ownership (CoO).

• Fastest OCD in the market - 250 WPH 13 sites


• 30% more accurate


• 30% better tool-to-tool matching


• Small pad size


• Up to three metrology units for easy on-site upgrade path and extendibility to future metrology


• Wafer stress metrology option