NovaScan’s Stand-Alone platform (SA) provides a state-of-the-art metrology solution, implementing polarized normal incidence spectroscopic scatterometry with an extended UV and IR spectral range. NovaScan’s SA metrology features industry-leading fleet-matching and the highest throughput available today.

• High-end metrology meets 32 nm requirements


• Best fleet-matching with no need for application specific recipe adjustment or calibration


• Unmatched throughput and reliability result in lower CoO


• Full compatibility with Nova’s IM platform enables a mixed solution


• Together with NovaMARS, provides advanced 2D/3D and in-die modeling and measurement


• Offers a wide range of metrology solutions for Etch, Lithography, CMP and CVD