NovaScan integrated metrology platform provides a state-of-the-art metrology solution, implementing polarized normal incidence spectroscopic scatterometry with an extended UV and IR spectral range. Featuring the highest fleet (tool-to-tool) matching and throughput, the NovaScan integrated platform is an ideal, cost-effective metrology solution for the most demanding 2D, 3D, and in-die Optical CD and shape profiling applications down to 32 nm.

• High-end metrology and APC enabler down to 32nm


• Best fleet-matching with no need for recipe adjustment or calibration


• Unmatched throughput and reliability results in lower CoO


• Full compatibility with Nova’s SA platform enables a mixed solution


• With NovaMARS, provides advanced 2D/3D and in-die modeling & measurement


• Offers a wide range of metrology solutions for Etch, Lithography and CMP